A high repetitive, laboratory scale EUV source based on a gas discharge plasma

Summary form only given. In this work a gas discharge plasma is presented, where these problems can be solved. In the device presented a pinch plasma is generated in a fast discharge of about 2J of electrically stored energy leading to a peak current of about 10 kA. Using oxygen, the emission of lithium-like ions at around 13 nm can be observed, which indicates a plasma temperature of about 20 eV. Time resolved measurements show a X-ray pulse of about 10 ns duration occurring at the instant of maximum compression that can be observed in the current pulse (dI/dt). In first experiments a repetitive operation of more than 100 Hz could be demonstrated.