Electrical characteristics of floating electrode MEMS capacitive switches

Author

Michalas, L. ; Koutsoureli, M. ; Papandreou, E. ; Papaioannou, G.J. ; Giacomozzi, Flavio ; Colpo, Sabrina ; Margesin, Benno

Author_Institution

Phys. Dept., Univ. of Athens, Athens, Greece

fYear

2012

Firstpage

36

Lastpage

39

Abstract

The present paper investigates in depth the electrical behaviour of floating electrode MEMS switches when their actuation is performed through the transmission line. The study is carried out through modeling and experimentally obtained capacitance- and current-voltage characteristic. It is demonstrated for the first time that constant down state capacitance is achieved without contacting the floating electrode with the moving armature. Moreover the pull-in and pull-out conditions are discussed in details.

Keywords

microelectrodes; microswitches; transmission lines; capacitance characteristic; constant down state capacitance; current-voltage characteristic; electrical behaviour; electrical characteristics; floating electrode MEMS capacitive switches; moving armature; transmission line; Bridge circuits; Capacitance; Capacitance-voltage characteristics; Dielectric films; Electric fields; Electrodes; Micromechanical devices; Capacitive Switch; Floating Electrode; RF-MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Integrated Circuits Conference (EuMIC), 2012 7th European

Conference_Location

Amsterdam

Print_ISBN

978-1-4673-2302-4

Electronic_ISBN

978-2-87487-026-2

Type

conf

Filename

6483729