Title :
Electrical characteristics of floating electrode MEMS capacitive switches
Author :
Michalas, L. ; Koutsoureli, M. ; Papandreou, E. ; Papaioannou, G.J. ; Giacomozzi, Flavio ; Colpo, Sabrina ; Margesin, Benno
Author_Institution :
Phys. Dept., Univ. of Athens, Athens, Greece
Abstract :
The present paper investigates in depth the electrical behaviour of floating electrode MEMS switches when their actuation is performed through the transmission line. The study is carried out through modeling and experimentally obtained capacitance- and current-voltage characteristic. It is demonstrated for the first time that constant down state capacitance is achieved without contacting the floating electrode with the moving armature. Moreover the pull-in and pull-out conditions are discussed in details.
Keywords :
microelectrodes; microswitches; transmission lines; capacitance characteristic; constant down state capacitance; current-voltage characteristic; electrical behaviour; electrical characteristics; floating electrode MEMS capacitive switches; moving armature; transmission line; Bridge circuits; Capacitance; Capacitance-voltage characteristics; Dielectric films; Electric fields; Electrodes; Micromechanical devices; Capacitive Switch; Floating Electrode; RF-MEMS;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4673-2302-4
Electronic_ISBN :
978-2-87487-026-2
