Title :
A terahertz micromachined on-wafer probe for WR-1.2 waveguide
Author :
Bauwens, M. ; Lihan Chen ; Chunhu Zhang ; Arsenovic, Alexander ; Lichtenberger, Arthur ; Barker, N.S. ; Weikle, Robert M.
Author_Institution :
Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA
Abstract :
A micromachined on-wafer probe designed for WR-1.2 rectangular waveguide is demonstrated in this paper to further enable submillimeter-wave integrated circuits testing. Initial measurements of a prototype WR-1.2 micromachined on-wafer probe exhibit an insertion loss better than 9 dB for the lower half of the WR-1.2 band.
Keywords :
integrated circuit testing; rectangular waveguides; submillimetre waves; terahertz waves; WR-1.2 rectangular waveguide; insertion loss; submillimeter-wave integrated circuits testing; terahertz micromachined on-wafer probe; Calibration; Coplanar waveguides; Force; Probes; Scattering parameters; Springs; Substrates;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4673-2302-4
Electronic_ISBN :
978-2-87487-026-2
