• DocumentCode
    1642036
  • Title

    A terahertz micromachined on-wafer probe for WR-1.2 waveguide

  • Author

    Bauwens, M. ; Lihan Chen ; Chunhu Zhang ; Arsenovic, Alexander ; Lichtenberger, Arthur ; Barker, N.S. ; Weikle, Robert M.

  • Author_Institution
    Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA
  • fYear
    2012
  • Firstpage
    88
  • Lastpage
    91
  • Abstract
    A micromachined on-wafer probe designed for WR-1.2 rectangular waveguide is demonstrated in this paper to further enable submillimeter-wave integrated circuits testing. Initial measurements of a prototype WR-1.2 micromachined on-wafer probe exhibit an insertion loss better than 9 dB for the lower half of the WR-1.2 band.
  • Keywords
    integrated circuit testing; rectangular waveguides; submillimetre waves; terahertz waves; WR-1.2 rectangular waveguide; insertion loss; submillimeter-wave integrated circuits testing; terahertz micromachined on-wafer probe; Calibration; Coplanar waveguides; Force; Probes; Scattering parameters; Springs; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
  • Conference_Location
    Amsterdam
  • Print_ISBN
    978-1-4673-2302-4
  • Electronic_ISBN
    978-2-87487-026-2
  • Type

    conf

  • Filename
    6483742
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1642036