Title :
Micro-semiconductor tactile sensor for the automatic obstacle-avoidance system of endoscope
Author :
Linyong, Shen ; Jinwu, Qian ; Zhen, Zhang ; Yanan, Zhang ; Jinxi, Yin
Author_Institution :
Sch. of Mechatronics Eng. & Autom., Shanghai Univ., China
Abstract :
The paper studies a tactile sensor. This micro-semiconductor tactile sensor is made of silicon and can be used for the automatic obstacle-avoidance system of endoscope. This paper presents details of the principle of the micro silicon semiconductor sensor at first. Then its design is presented. The application of the sensor in intelligent endoscope system which uses MEMS technology is also explained. At last, the experiment results and analysis are presented.
Keywords :
elemental semiconductors; endoscopes; microsensors; semiconductor devices; silicon; tactile sensors; MEMS technology; Si; intelligent endoscope; micro silicon semiconductor; obstacle avoidance; sensor design; tactile sensor; Colon; Colonoscopy; Endoscopes; Immune system; Intelligent sensors; Intelligent systems; Piezoresistance; Silicon; Tactile sensors; Voltage;
Conference_Titel :
High Density Microsystem Design and Packaging and Component Failure Analysis, 2004. HDP '04. Proceeding of the Sixth IEEE CPMT Conference on
Print_ISBN :
0-7803-8620-5
DOI :
10.1109/HPD.2004.1346695
