Title :
PID-controller application in the system for variable technological process
Author :
Baranov, Simion ; Cojuhari, Irina ; Fiodorov, Ion ; Gorceac, Leonid
Author_Institution :
Sci. & Eng. Centre Informinstrument, Chisinau, Moldova
Abstract :
This report concerns the automatic control system based on the programmable controller TRM-151-01 of the temperature of semiconductor alloying with zinc and tellurium. The goal of the research is the industrial modernization of the epitaxial growth technology of semiconductor materials in the form of thin multiple layers (inclusively nano-dimensions) with variable values of the electric conductibility.
Keywords :
programmable controllers; semiconductor industry; three-term control; PID controller application; automatic control system; electric conductibility; epitaxial growth technology; industrial modernization; programmable controller TRM-151-01; semiconductor alloying; semiconductor materials; tellurium; thin multiple layers; variable technological process; zinc; Educational institutions; Epitaxial growth; Epitaxial layers; Gallium arsenide; Metals; Oscillators; Process control; automation; epitaxial layer; gallium compounds; tellurium alloy; zinc alloy;
Conference_Titel :
Development and Application Systems (DAS), 2014 International Conference on
Conference_Location :
Suceava
DOI :
10.1109/DAAS.2014.6842418
