Wafer-level magnetotransport measurement of advanced transistors - making a powerful technique even more powerful

For transistor research and development, one of the important figures of merit is the carrier mobility. The measurement of mobility is cumbersome in large devices, and nearly impossible in nano scale devices. Very often, effective mobility (μ_eff) is extracted from the I-V curve instead. There are many pitfalls in equating μ_eff to mobility (μ), including charge-trapping and series resistance effects. The error can be quite large. This is a urgent issue for advanced CMOS technology. In this paper, two novel advances in mobility measurement introduced by our group recently are presented. Both are Hall Effect based and are well known. Our innovations enable both techniques to be deployed easily in any laboratory as well as factory floor.