• DocumentCode
    1644496
  • Title

    Dielectric less and dimple less MEMS capacitive switches: The actuation mechanism

  • Author

    Michalas, L. ; Koutsoureli, M. ; Papaioannou, G.J. ; Stavrinidis, G. ; Konstantinidis, G.

  • Author_Institution
    Phys. Dept., Univ. of Athens, Athens, Greece
  • fYear
    2012
  • Firstpage
    445
  • Lastpage
    448
  • Abstract
    The present paper investigates for the first time the electrical properties of dielectric less and dimple less MEMS capacitive switches. The capacitance of these devices increases rapidly beyond pull-in being proportional to the Fowler-Nordhein current-voltage relation. The study is carried out through experimentally obtained capacitance- and current-voltage characteristic that agree with the corresponding capacitance and field emission current models.
  • Keywords
    field emission; microswitches; Fowler-Nordhein current voltage relation; actuation mechanism; dielectric less MEMS capacitive switches; dimple less MEMS capacitive switches; field emission current models; Bridge circuits; Capacitance; Dielectrics; Electric fields; Electrodes; Micromechanical devices; Radio frequency; Fowler-Nordheim current; MEMS capacitive switch; dielectric less device;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
  • Conference_Location
    Amsterdam
  • Print_ISBN
    978-1-4673-2302-4
  • Electronic_ISBN
    978-2-87487-026-2
  • Type

    conf

  • Filename
    6483832
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1644496