A micro-electro-mechanically (MEM) switched microstrip ring resonator

Author

Choudhury, D. ; Foschaar, J.A.

Author_Institution

HRL Lab., Malibu, CA, USA

fYear

1999

Firstpage

693

Lastpage

696

Abstract

Electronically switchable microwave and millimeter wave filters are required for a variety of microwave and millimeter wave systems. In this paper, we report a millimeter wave microelectro-mechanically (MEM) switched ring resonator for electronically switchable bandpass filter applications. RF MEM switches used in this circuit have better than 0.2 dB insertion loss at the resonator pass band around 31.1 GHz. The integration of these low-loss switches and a tight coupling gap enabled us to demonstrate a low (<0.9 dB) transmission loss resonator in its pass band. This is the first demonstration of the monolithic integration of the RF MEM switches with microstrip-based planar circuit components.

Keywords

MIMIC; band-pass filters; losses; micromechanical resonators; microstrip filters; microstrip resonators; millimetre wave filters; switched filters; 31.1 GHz; MEM switched microstrip ring resonator; bandpass filter applications; coupling gap; electronically switchable filters; insertion loss; millimeter wave filters; planar circuit components; resonator pass band; transmission loss; Band pass filters; Insertion loss; Microstrip; Microwave filters; Millimeter wave circuits; Optical ring resonators; Radio frequency; Resonator filters; Switches; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-5410-9

Type

conf

DOI

10.1109/IEDM.1999.824246

Filename

824246