Reference SAW oscillator on quartz-on-silicon (QoS) wafer for polylithic integration of true single chip radio

Author

Yunseong Eo ; Seokbong Hyun ; Pilsoon Choi ; Kwyro Lee ; Gilhwan Oh ; Joong-Won Lee

Author_Institution

Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

fYear

1999

Firstpage

761

Lastpage

764

Abstract

This paper presents an electro-acoustic circuit fabricated on quartz directly bonded on the processed silicon wafer (QoS), which allows us to polylithically integrate high precision passives with integrated circuits. We first fabricated a prototype SAW resonator and oscillator on thick QoS. The SAW resonator on QoS shows Q about 10,000 and 11 dB insertion loss at 289 MHz, and SAW oscillator on QoS shows phase noise as small as 120 dBc at 10 kHz offset, demonstrating the feasibility of a true single chip radio.

Keywords

VHF oscillators; monolithic integrated circuits; phase noise; quartz; radio receivers; silicon; surface acoustic wave oscillators; surface acoustic wave resonators; 11 dB; 289 MHz; SAW oscillator; SAW resonator; Si; SiO/sub 2/-Si; electro-acoustic circuit; high precision passive components; integrated circuits; phase noise; polylithic integration; quartz-on-silicon wafer; reference SAW oscillator; single chip radio; Dielectrics; Filters; Integrated circuit technology; Materials science and technology; Oscillators; Prototypes; Radio frequency; Silicon; Surface acoustic waves; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-5410-9

Type

conf

DOI

10.1109/IEDM.1999.824262

Filename

824262