Title :
Laser fabrication of non-tapered deep micro holes: Strategies and working tools
Author :
Ashkenasi, David ; Müller, Norbert ; Lemke, Andreas ; Kaszemeikat, Tristan ; Schmidt, Matthias ; Jahns, Daniel ; Eichler, Hans Joachim
Author_Institution :
Angewandte Lasertech., Laser - und Medizin-Technol. Berlin, Berlin, Germany
Abstract :
The implementation of laser processing strategies and working tools for micro cylindrical drilling at high aspect ratio is demonstrated for glasses, ceramics and metals. Laser parameters vary in wavelength, pulse width and pulse energy.
Keywords :
aluminium compounds; ceramics; drilling; glass; laser beam machining; laser materials processing; metals; micro-optics; optical fabrication; tools; AlN; aspect ratio; ceramics; glasses; laser fabrication; laser processing; metals; microcylindrical drilling; nontapered deep microholes; pulse energy; pulse width; Ceramics; Laser beam cutting; Laser beams; Optics; Semiconductor lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
