Title :
Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit
Author :
Serrels, K.A. ; Farrell, C. ; Lundquist, T.R. ; Reid, D.T. ; Vedagarbha, P.
Author_Institution :
DCG Syst. Inc., Fremont, CA, USA
Abstract :
By inducing two-photon absorption within the active layer of a proprietary silicon test chip, we demonstrate solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a 500-MHz ring oscillator circuit.
Keywords :
failure analysis; integrated circuit testing; lenses; optical microscopy; oscillators; silicon; Si; frequency 500 MHz; nonlinear frequency-variation mapping; optoelectronic microscopy; ring oscillator circuit; silicon integrated-circuit; silicon test chip; solid-immersion-lens; two-photon absorption; Frequency measurement; Measurement by laser beam; Microscopy; Ring lasers; Ring oscillators; Silicon; Testing;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
