• DocumentCode
    1646583
  • Title

    3-D Micro Electro Magnetic Radio Frequency Systems (3-D MERFS) and other DARPA RF MEMS Programs

  • Author

    Evans, John D.

  • Author_Institution
    Defense Adv. Res. Projects Agency, Anaheim, CA
  • fYear
    2006
  • Firstpage
    211
  • Lastpage
    214
  • Abstract
    The Defense Advanced Research Projects Agency (DARPA), Microsystem Technology Office (MTO) currently sponsors a number of efforts to improve the performance of radio frequency (RF) systems using micro electromechanical systems (MEMS) technology. These include the 3-dimensional micro electromagnetic radio frequency systems (3-D MERFS), analog spectral processors (ASP), and harsh environment robust micromechanical technology (HERMIT), and micro cyrogenic coolers (MCC). In this talk, Dr. Evans provides an overview of these four efforts, focusing specifically on recent advances in the 3-D MERFS program
  • Keywords
    micromechanical devices; radiofrequency integrated circuits; 3D MERFS; 3D micro electro magnetic radiofrequency systems; ASP; DARPA RF MEMS programs; Defense Advanced Research Projects Agency; HERMIT; MCC; MEMS technology; MTO; Microsystem Technology Office; analog spectral processors; harsh environment robust micromechanical technology; micro cyrogenic coolers; microelectromechanical systems; Attenuation; Conductors; Copper; Couplers; Dielectrics; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Testing; Transmission lines;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Compound Semiconductor Integrated Circuit Symposium, 2006. CSIC 2006. IEEE
  • Conference_Location
    San Antonio, TX
  • Print_ISBN
    1-4244-0126-7
  • Electronic_ISBN
    1-4244-0127-5
  • Type

    conf

  • DOI
    10.1109/CSICS.2006.319959
  • Filename
    4110022