Title :
CVD Diamond - The Next Generation Electronic Material
Author :
Kohn, Erhard ; Denisenko, Andrej
Author_Institution :
Dept. of Electron Devices & Circuits, Ulm Univ.
Abstract :
The status of diamond electronic device structures for high power, high temperature and high frequency is reviewed and latest data are highlighted. First results on the operation in harsh environment and very high temperature suggest that besides the power handling capability, the stability, robustness and reliability may be superior to that of all other semiconductors
Keywords :
chemical vapour deposition; diamond; semiconductor materials; CVD diamond; diamond electronic device structures; electronic material; power handling capability; Boron; Cutoff frequency; Doping; Electric breakdown; FETs; Plasma temperature; Robust stability; Schottky diodes; Substrates; Thermal conductivity;
Conference_Titel :
Compound Semiconductor Integrated Circuit Symposium, 2006. CSIC 2006. IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
1-4244-0126-7
Electronic_ISBN :
1-4244-0127-5
DOI :
10.1109/CSICS.2006.319946
