Fabrication of DFB laser arrays by SAG of upper SCH layer

Multi-wavelength light sources are key components in wavelength division multiplexing (WDM) optical transmission systems and are indispensable in future photonic networks. Monolithically integrated distributed feed back (DFB) laser arrays are widely used for their stable and highly reliable single-mode operation in modern WDM system, which enables optical networks cost-effective, reliable and provides higher performance and more functionality. Different lasing wavelengths of a laser array can be obtained either by varying the pitch of the built-in grating or by changing the waveguide´s effective refractive index from element to element.