Title :
Frequency-doubled supercontinuum for scanning white-light interferometry
Author :
Ryczkowski, Piotr ; Genty, Goëry ; Nolvi, Anton ; Kassamakov, Ivan ; Haggstrom, E.
Author_Institution :
Opt. Lab., Tampere Univ. of Technol., Tampere, Finland
Abstract :
We present a compact, broadband source with tunable repetition rate working in the visible/near-infrared for scanning white-light interferometry. Three-dimensional characterization of MEMS with 7 micron axial resolution is demonstrated.
Keywords :
high-speed optical techniques; light interferometry; light sources; micro-optomechanical devices; optical harmonic generation; supercontinuum generation; MEMS; broadband source; frequency doubling; near infrared spectra; scanning white-light interferometry; supercontinuum; three-dimensional characterization; tunable repetition rate; visible spectra; Crystals; Imaging; Laser excitation; Micromechanical devices; Optical fibers; Optical interferometry; Pump lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
