Title :
Wafer level integration of a 24 GHz and 34 GHz differential SiGe-MMIC oscillator with a loop antenna on a BCB membrane
Author :
Abele, P. ; Konle, J. ; Behammer, D. ; Sonmez, E. ; Schad, K.-B. ; Trasser, A. ; Schumacher, Hermann
Author_Institution :
Dept. of Electron Devices & Circuits, Ulm Univ., Germany
Abstract :
The wafer level integration of a 24 GHz and 34 GHz SiGe-MMIC oscillator with buffer amplifier and a loop antenna on a BCB (Benzo Cyclo Butene) membrane is demonstrated. The phase noise of the non-integrated 24 GHz and 34 GHz oscillator is -104 dBc/Hz and -88 dBc/Hz at an offset frequency of 1 MHz and the output power was measured to be +1 dBm and -3 dBm, respectively. The radiated power of both integrated systems is determined based on measurements with a horn antenna and discussed.
Keywords :
Ge-Si alloys; MIMIC; MMIC oscillators; integrated circuit packaging; loop antennas; membranes; microwave antennas; millimetre wave antennas; millimetre wave oscillators; semiconductor materials; silicon; 24 GHz; 34 GHz; BCB membrane; Si; Si substrate; SiGe; benzo cyclo butene membrane; buffer amplifier; differential SiGe MMIC oscillator; loop antenna; phase noise; wafer level integration; Antenna measurements; Biomembranes; Frequency measurement; Noise measurement; Oscillators; Phase measurement; Phase noise; Power amplifiers; Power generation; Power measurement;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1212545
