• DocumentCode
    1647093
  • Title

    Femtosecond enhancement cavity EUV source with high energy resolution

  • Author

    Lam, Matthew H C ; Mills, Arthur K. ; Chasovskikh, Egor ; Jones, David J.

  • Author_Institution
    Dept. of Phys. & Astron., Univ. of British Columbia, Vancouver, BC, Canada
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A table-top EUV source based on a femtosecond enhancement cavity is seeded by a 1040-nm Yb-doped fiber amplifier system with 185-fs pulses and produces >;10 microwatts/harmonic at 80 MHz out to 55 nm.
  • Keywords
    laser beam effects; optical fibre amplifiers; optical harmonic generation; ytterbium; Yb-doped fiber amplifier system; femtosecond enhancement cavity; frequency 80 MHz; high energy resolution; table-top EUV source; time 185 fs; wavelength 1040 nm; wavelength 55 nm; Cavity resonators; Energy resolution; Harmonic analysis; Power system harmonics; Spectroscopy; Ultrafast optics; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325413