DocumentCode
1647109
Title
Optical Coherence Tomography using broad-bandwidth XUV and soft x-ray radiation
Author
Fuchs, S. ; Blinne, A. ; Rödel, C. ; Zastrau, U. ; Hilbert, V. ; Wünsche, M. ; Bierbach, J. ; Förster, E. ; Paulus, G.G.
Author_Institution
Inst. of Opt. & Quantum Electron., Friedrich-Schiller Univ. of Jena, Jena, Germany
fYear
2012
Firstpage
1
Lastpage
2
Abstract
We report on the extension of Optical Coherence Tomography using extreme ultraviolet and soft X-ray radiation and demonstrate an axial resolution of nanometers.
Keywords
X-ray optics; optical tomography; ultraviolet radiation effects; axial resolution; broad-bandwidth XUV radiation; extreme ultraviolet radiation; nanometers; optical coherence tomography; soft X-ray radiation; Coherence; Gold; Gratings; Optical imaging; Optical interferometry; Silicon; Tomography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-4673-1839-6
Type
conf
Filename
6325414
Link To Document