Title :
Optical Coherence Tomography using broad-bandwidth XUV and soft x-ray radiation
Author :
Fuchs, S. ; Blinne, A. ; Rödel, C. ; Zastrau, U. ; Hilbert, V. ; Wünsche, M. ; Bierbach, J. ; Förster, E. ; Paulus, G.G.
Author_Institution :
Inst. of Opt. & Quantum Electron., Friedrich-Schiller Univ. of Jena, Jena, Germany
Abstract :
We report on the extension of Optical Coherence Tomography using extreme ultraviolet and soft X-ray radiation and demonstrate an axial resolution of nanometers.
Keywords :
X-ray optics; optical tomography; ultraviolet radiation effects; axial resolution; broad-bandwidth XUV radiation; extreme ultraviolet radiation; nanometers; optical coherence tomography; soft X-ray radiation; Coherence; Gold; Gratings; Optical imaging; Optical interferometry; Silicon; Tomography;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
