DocumentCode
1648020
Title
Tabletop reflection mode coherent diffractive imaging of periodic nano-structures with 100 nm resolution
Author
Seaberg, Matthew D. ; Adams, Daniel E. ; Zhang, Bosheng ; Murnane, Margaret M. ; Kapteyn, Henry C.
Author_Institution
Dept. of Phys., Univ. of Colorado, Boulder, CO, USA
fYear
2012
Firstpage
1
Lastpage
2
Abstract
We report the first reflection-mode coherent diffraction imaging using a tabletop short wavelength light source. A novel imaging scheme can probe metalic nano-pillar arrays with ~100 nm resolution.
Keywords
light diffraction; light reflection; mirrors; nanostructured materials; optical images; optical instruments; optical microscopy; optical multilayers; periodic structures; metalic nanopillar arrays; novel imaging; periodic nanostructure; short wavelength light source; tabletop reflection mode coherent diffractive imaging; Diffraction; Imaging; Reflection; Spatial resolution; Surface waves; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-4673-1839-6
Type
conf
Filename
6325447
Link To Document