• DocumentCode
    1648020
  • Title

    Tabletop reflection mode coherent diffractive imaging of periodic nano-structures with 100 nm resolution

  • Author

    Seaberg, Matthew D. ; Adams, Daniel E. ; Zhang, Bosheng ; Murnane, Margaret M. ; Kapteyn, Henry C.

  • Author_Institution
    Dept. of Phys., Univ. of Colorado, Boulder, CO, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report the first reflection-mode coherent diffraction imaging using a tabletop short wavelength light source. A novel imaging scheme can probe metalic nano-pillar arrays with ~100 nm resolution.
  • Keywords
    light diffraction; light reflection; mirrors; nanostructured materials; optical images; optical instruments; optical microscopy; optical multilayers; periodic structures; metalic nanopillar arrays; novel imaging; periodic nanostructure; short wavelength light source; tabletop reflection mode coherent diffractive imaging; Diffraction; Imaging; Reflection; Spatial resolution; Surface waves; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325447