Title :
Tunable ferroelectric filter-phase shifter
Author :
Deleniv, A. ; Abadei, S. ; Gevorgian, S.
Author_Institution :
Dept. of Microelectron. MC-2, Chalmers Univ. of Technol., Gothenburg, Sweden
Abstract :
Design of a tuneable filter-phase shifter is presented. Thin ferroelectric film varactors are used to provide voltage tuneable phase shift in a silicon coplanar waveguide (CPW). Varactors with zero bias capacitance 0.17pF, loss tangent tan/spl delta/-0.04 and 20% tuneability provide continuous voltage tuneable phase shift up to 90/spl deg//spl plusmn/5/spl deg/ at 19 GHz with 10% bandwidth. The figure of merit is about 30/spl deg//dB. The sizes of the phase shifter silicon chip are less than 2/spl times/5.5mm. The phase shifter is designed for possible integration in silicon MMICs.
Keywords :
MMIC phase shifters; coplanar waveguide components; dielectric losses; ferroelectric devices; varactors; waveguide filters; 0.17 pF; 19 GHz; MMICs; Si; continuous voltage tuneable phase shift; coplanar waveguide; ferroelectric film varactors; loss tangent; tuneable filter-phase shifter; zero bias capacitance; Bandwidth; Capacitance; Coplanar waveguides; Ferroelectric films; Ferroelectric materials; MMICs; Phase shifters; Silicon; Varactors; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1212600
