Title :
Temperature compensated solidly mounted bulk acoustic wave resonators with optimum piezoelectric coupling coefficient
Author :
Allah, Mohamed Abd ; Kaitila, Jyrki ; Thalhammer, Robert ; Weber, Werner ; Schmitt-Landsiedel, Doris
Author_Institution :
Tech. Univ. of Munich, Munich, Germany
Abstract :
We propose a new way to temperature compensate solidly mounted bulk acoustic wave resonators (SMRs). With the proposed process high Q, high electromechanical coupling coefficient, fully temperature compensated resonators have been successfully fabricated with TCF less than 1 ppm/°C and total thermal drift of less than 35 ppm across the temperature range from 0-100°C.
Keywords :
bulk acoustic wave devices; compensation; piezoelectricity; surface acoustic wave resonators; electromechanical coupling; optimum piezoelectric coupling coefficient; solidly mounted bulk acoustic wave resonator; temperature 0 C to 100 C; temperature compensation; Acoustic waves; Elasticity; Electrodes; Frequency measurement; Manufacturing; Mirrors; Piezoelectric materials; Stress; Temperature distribution; Tungsten;
Conference_Titel :
Electron Devices Meeting (IEDM), 2009 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-5639-0
Electronic_ISBN :
978-1-4244-5640-6
DOI :
10.1109/IEDM.2009.5424224
