• DocumentCode
    1649248
  • Title

    Temperature compensated solidly mounted bulk acoustic wave resonators with optimum piezoelectric coupling coefficient

  • Author

    Allah, Mohamed Abd ; Kaitila, Jyrki ; Thalhammer, Robert ; Weber, Werner ; Schmitt-Landsiedel, Doris

  • Author_Institution
    Tech. Univ. of Munich, Munich, Germany
  • fYear
    2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    We propose a new way to temperature compensate solidly mounted bulk acoustic wave resonators (SMRs). With the proposed process high Q, high electromechanical coupling coefficient, fully temperature compensated resonators have been successfully fabricated with TCF less than 1 ppm/°C and total thermal drift of less than 35 ppm across the temperature range from 0-100°C.
  • Keywords
    bulk acoustic wave devices; compensation; piezoelectricity; surface acoustic wave resonators; electromechanical coupling; optimum piezoelectric coupling coefficient; solidly mounted bulk acoustic wave resonator; temperature 0 C to 100 C; temperature compensation; Acoustic waves; Elasticity; Electrodes; Frequency measurement; Manufacturing; Mirrors; Piezoelectric materials; Stress; Temperature distribution; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2009 IEEE International
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4244-5639-0
  • Electronic_ISBN
    978-1-4244-5640-6
  • Type

    conf

  • DOI
    10.1109/IEDM.2009.5424224
  • Filename
    5424224
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1649248