Title :
Early LSI mass production - fast yield improvement and Si debugging
Author_Institution :
NEC Corp., Kawasaki, Japan
Abstract :
Failure analysis plays a very important role in the early introduction and fast yield improvement of new generation LSI´s. We have developed novel failure analysis technologies including an expert-system-based memory cell failure cause identification system, which is linked to a particle or defect monitoring tool, as well as failure location isolation systems for memory peripheral circuitry and logic LSI´s. This paper reviews all these technologies and introduces some examples of their implementation
Keywords :
integrated circuit yield; ICFAN; LSI mass production; MEMOFAN; MEMOFANEX; Si debugging; defect monitoring tool; expert-system-based system; failure analysis technologies; failure location isolation systems; logic LSI devices; memory cell failure cause identification system; memory peripheral circuitry; particle monitoring tool; yield improvement; Circuits; Debugging; Expert systems; Failure analysis; Investments; Isolation technology; Large scale integration; Random access memory; Read-write memory; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-2053-0
DOI :
10.1109/ASMC.1994.588223
