Early LSI mass production - fast yield improvement and Si debugging

Failure analysis plays a very important role in the early introduction and fast yield improvement of new generation LSI´s. We have developed novel failure analysis technologies including an expert-system-based memory cell failure cause identification system, which is linked to a particle or defect monitoring tool, as well as failure location isolation systems for memory peripheral circuitry and logic LSI´s. This paper reviews all these technologies and introduces some examples of their implementation