Title :
Transparent conductive oxides for effective low-refractive-index Ohmic contact to nanophotonic devices demonstrated with Fabry-Perot lasers
Author :
Ou, Fang ; Hseih, Chunhan ; Yi, Fei ; Huang, Yingyan ; Ho, Seng-Tiong
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL, USA
Abstract :
We show the possibility of using transparent conductive oxide (TCO) for the current injection into nanophotonic devices. An InP based coplanar electrode Fabry-Perot micro-laser utilizing indium oxide (In2O3) as the n-type cladding electrode is demonstrated.
Keywords :
III-V semiconductors; claddings; conducting materials; indium compounds; integrated optoelectronics; nanophotonics; ohmic contacts; refractive index; semiconductor lasers; transparency; InP-In2O3; TCO; coplanar electrode Fabry-Perot microlaser; current injection; low-refractive-index Ohmic contact; n-type cladding electrode; nanophotonic devices; transparent conductive oxides; Electrodes; Indium phosphide; Metals; Optical device fabrication; Semiconductor lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
