First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester

Author

Elfrink, R. ; Pop, V. ; Hohlfeld, D. ; Kamel, T.M. ; Matova, S. ; de Nooijer, C. ; Jambunathan, M. ; Goedbloed, M. ; Caballero, L. ; Renaud, M. ; Penders, J. ; van Schaijk, R.

Author_Institution

Holst Centre, IMEC, Eindhoven, Netherlands

fYear

2009

Firstpage

1

Lastpage

4

Abstract

This paper describes the experimental characterization of piezoelectric harvesters with different dimensions. We present a record level of generated power of 85 Â¿W obtained from an unpacked device. We have developed a wafer-scale vacuum package which shows a 100-200 fold increase in power output compared with packaged devices under atmospheric pressure. A wireless sensor node was fully powered by a piezoelectric harvester. The average power consumption was less than 10 Â¿W while it was operating at 15 seconds duty cycle.

Keywords

electronics packaging; energy harvesting; piezoelectric devices; wireless sensor networks; atmospheric pressure; autonomous wireless sensor node; piezoelectric harvesters; power 85 muW; vacuum-packaged piezoelectric MEMS energy harvester; wafer-scale vacuum package; Damping; Elementary particle vacuum; Micromechanical devices; Packaging; Piezoelectric materials; Power generation; Resonance; Resonant frequency; Wafer scale integration; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2009 IEEE International

Conference_Location

Baltimore, MD

Print_ISBN

978-1-4244-5639-0

Electronic_ISBN

978-1-4244-5640-6

Type

conf

DOI

10.1109/IEDM.2009.5424300

Filename

5424300