Title :
Accelerating aging failures in MEMS devices
Author :
Tanner, Danelle M. ; Walraven, Jeremy A. ; Dugger, Michael T. ; Parson, Ted B. ; Candelaria, Sam A. ; Jenkins, Mark W. ; Corwin, Alex D. ; Ohlhausen, James A. ; Huffman, Elizabeth M.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Keywords :
adhesion; ageing; humidity; microactuators; monolayers; temperature; vapour deposited coatings; 0.3 micron; 2 to 200 hour; 200 C; 300 C; aging failure acceleration; cantilever beams; electrostatic-actuated MEMS devices; humidity; load gear hub; surface adhesion; temperature; vapor-deposited self assembled monolayer; Accelerated aging; Adhesives; Coatings; Degradation; Humidity; Hydrocarbons; Microelectromechanical devices; Micromechanical devices; Silicon; Temperature;
Conference_Titel :
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN :
0-7803-8803-8
DOI :
10.1109/RELPHY.2005.1493105
