1651596

Dynamic analysis and characterization of mems accelerometers by computational and opto-electromechanical methodologies

Furlong, Cosme ; Kok, Ronald ; Ferguson, Curtis F.

Dept. of Mech. Eng., Worcester Polytech. Inst., MA, USA

2005

325

329

accelerometers; deformation; dynamic response; finite element analysis; holography; microsensors; optical microscopy; 3D finite element methods; MEMS accelerometers; MEMS inertial sensors; accuracy; characterization; computational methodologies; dynamic analysis; dynamic response; dynamically induced deformation measurement; near realtime; opto-electromechanical methodologies; optoelectronic holographic microscopy; precision; reliability; shape measurement; Acceleration; Accelerometers; Computational modeling; Finite element methods; Frequency measurement; High performance computing; Micromechanical devices; Optoelectronic and photonic sensors; Sensor phenomena and characterization; Vehicle dynamics;

English

ieee

Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International

0-7803-8803-8

conf

10.1109/RELPHY.2005.1493106

1493106