Title :
Structural and thermal investigation for FBAR reliability in wireless applications
Author :
Fillit, Rene-Yves ; Ivira, Brice ; Boussey, Jumana ; Fortunier, Roland ; Ancey, Paseal
Author_Institution :
SMS, Ecole des Mines de Saint Etienne, France
Keywords :
X-ray diffraction; X-ray fluorescence analysis; acoustic resonators; bulk acoustic wave devices; failure analysis; finite element analysis; infrared imaging; micromechanical resonators; piezoelectric thin films; radiography; reliability; thermal analysis; FBAR structural investigation; FBAR thermal investigation; FEA; RF self heating; RF-MEMS; X-ray diffraction; X-ray fluorescence analysis; X-ray radiography; failure analysis; failure mechanisms; film bulk acoustic resonators; finite element modeling; high-resolution IR imaging; in-situ thermal mapping; piezoelectric thin film; wireless device FBAR reliability; Acoustic testing; Acoustic waves; Electrodes; Failure analysis; Film bulk acoustic resonators; Infrared heating; Piezoelectric materials; Radiofrequency microelectromechanical systems; Silicon; Substrates;
Conference_Titel :
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN :
0-7803-8803-8
DOI :
10.1109/RELPHY.2005.1493109
