• DocumentCode
    1651688
  • Title

    Melt-segregate-quench programming of electrical fuse

  • Author

    Sasaki, Takahiko ; Otsuka, Nobuaki ; Hisano, Katsumi ; Fujii, Shuso

  • Author_Institution
    SoC R&D Center, Toshiba Corp., Kawasaki, Japan
  • fYear
    2005
  • Firstpage
    347
  • Lastpage
    351
  • Keywords
    PROM; circuit reliability; electric fuses; electromigration; heat conduction; 90 nm; e-fuse; electrical fuse programming; electrically programmable memory element; electromigration; large short current pulse; melt-segregate-quench programming procedure; nonvolatile memory; programming time reduction; retention characteristics reliability; self-agglomeration; thermal conduction analysis; Anodes; Atomic layer deposition; Circuits; Cobalt; Electrical resistance measurement; Fuses; Research and development; Silicides; Voltage; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
  • Print_ISBN
    0-7803-8803-8
  • Type

    conf

  • DOI
    10.1109/RELPHY.2005.1493110
  • Filename
    1493110
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1651688