DocumentCode :
1651688
Title :
Melt-segregate-quench programming of electrical fuse
Author :
Sasaki, Takahiko ; Otsuka, Nobuaki ; Hisano, Katsumi ; Fujii, Shuso
Author_Institution :
SoC R&D Center, Toshiba Corp., Kawasaki, Japan
fYear :
2005
Firstpage :
347
Lastpage :
351
Keywords :
PROM; circuit reliability; electric fuses; electromigration; heat conduction; 90 nm; e-fuse; electrical fuse programming; electrically programmable memory element; electromigration; large short current pulse; melt-segregate-quench programming procedure; nonvolatile memory; programming time reduction; retention characteristics reliability; self-agglomeration; thermal conduction analysis; Anodes; Atomic layer deposition; Circuits; Cobalt; Electrical resistance measurement; Fuses; Research and development; Silicides; Voltage; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN :
0-7803-8803-8
Type :
conf
DOI :
10.1109/RELPHY.2005.1493110
Filename :
1493110
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1651688
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