DocumentCode
1652074
Title
Characterization of thermoelectric devices in ICs as stimulated by a scanning laser beam
Author
Glowacki, Arkadiusz ; Boit, Christian
Author_Institution
TUB Berlin Univ. of Technol. Sekr. E2, Germany
fYear
2005
Firstpage
450
Lastpage
457
Keywords
Seebeck effect; failure analysis; integrated circuit interconnections; integrated circuit testing; measurement by laser beam; thermoelectric devices; IC failure analysis; OBIRCH; SEI phenomena; Seebeck effect imaging; TLS; bias voltage conditions; constant current condition; constant voltage condition; contacts; interconnects; microelectronics failure analysis; open circuit localization; optical beam induced resistance change; scanning laser beam stimulation; thermal laser stimulation; thermoelectric device characterization; thermoelectric effects; Laser beams; Laser transitions; Optical beams; Optical imaging; Optical materials; Temperature; Thermal resistance; Thermoelectric devices; Thermoelectricity; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN
0-7803-8803-8
Type
conf
DOI
10.1109/RELPHY.2005.1493127
Filename
1493127
Link To Document