• DocumentCode
    1652528
  • Title

    Fermi level depinning at metal-organic semiconductor interface for low-resistance Ohmic contacts

  • Author

    Liu, Zihong ; Kobayashi, Masaharu ; Paul, Bipul C. ; Bao, Zhenan ; Nishi, Yoshio

  • Author_Institution
    Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
  • fYear
    2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper presents the direct evidence and successful demonstration of Fermi-level depinning at metal-organic semiconductor (M/O) interfaces by inserting an ultrathin interfacial Si3N4 insulator in between. The contact behavior is tuned from rectifying to quasi-Ohmic and to tunneling by varying the Si3N4 thickness within 0-6 nm. Detailed physical mechanisms of Fermi-level pinning/depinning responsible for the M/O contact behavior are clarified based on a proposed lumped-dipole model. Experimental results are in good agreement with the theory and model. This work represents a significant step toward the fundamental understanding of M/O interface properties and technological advancement of achieving low-resistance Ohmic contacts for organic electronic device (e.g. thin-film transistor) applications.
  • Keywords
    Fermi level; ohmic contacts; organic semiconductors; organometallic compounds; semiconductor-metal boundaries; silicon compounds; Fermi level depinning; Si3N4; contact behavior; low-resistance ohmic contact; lumped-dipole model; metal-organic semiconductor interface; organic electronic device; quasi-Ohmic; size 0 nm to 6 nm; ultrathin interfacial Si3N4 insulator; Contact resistance; Gold; Metal-insulator structures; Ohmic contacts; Organic semiconductors; Pentacene; Semiconductor diodes; Semiconductor materials; Sputtering; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2009 IEEE International
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4244-5639-0
  • Electronic_ISBN
    978-1-4244-5640-6
  • Type

    conf

  • DOI
    10.1109/IEDM.2009.5424344
  • Filename
    5424344