Title :
Fermi level depinning at metal-organic semiconductor interface for low-resistance Ohmic contacts
Author :
Liu, Zihong ; Kobayashi, Masaharu ; Paul, Bipul C. ; Bao, Zhenan ; Nishi, Yoshio
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
This paper presents the direct evidence and successful demonstration of Fermi-level depinning at metal-organic semiconductor (M/O) interfaces by inserting an ultrathin interfacial Si3N4 insulator in between. The contact behavior is tuned from rectifying to quasi-Ohmic and to tunneling by varying the Si3N4 thickness within 0-6 nm. Detailed physical mechanisms of Fermi-level pinning/depinning responsible for the M/O contact behavior are clarified based on a proposed lumped-dipole model. Experimental results are in good agreement with the theory and model. This work represents a significant step toward the fundamental understanding of M/O interface properties and technological advancement of achieving low-resistance Ohmic contacts for organic electronic device (e.g. thin-film transistor) applications.
Keywords :
Fermi level; ohmic contacts; organic semiconductors; organometallic compounds; semiconductor-metal boundaries; silicon compounds; Fermi level depinning; Si3N4; contact behavior; low-resistance ohmic contact; lumped-dipole model; metal-organic semiconductor interface; organic electronic device; quasi-Ohmic; size 0 nm to 6 nm; ultrathin interfacial Si3N4 insulator; Contact resistance; Gold; Metal-insulator structures; Ohmic contacts; Organic semiconductors; Pentacene; Semiconductor diodes; Semiconductor materials; Sputtering; Thin film transistors;
Conference_Titel :
Electron Devices Meeting (IEDM), 2009 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-5639-0
Electronic_ISBN :
978-1-4244-5640-6
DOI :
10.1109/IEDM.2009.5424344