Title :
Fabrication of high temperature superconducting microstrip resonator with high Q and low power dependence
Author :
Chung, Dong-Chul ; Kang, Hyeong-Gon ; Han, Byung-Sung
Author_Institution :
Dept. of Electr. Eng., Chonbuk Nat. Univ., Chonju, South Korea
Abstract :
A microstrip resonator at Ku band was designed and fabricated using a high-temperature superconducting thin film. The YBa2Cu3O7-x thin film used in this research was deposited on SrTiO3 substrate using rf magnetron sputtering. The film exhibits unique microwave properties: high temperature operation (89 K) and low surface resistance (better than 1/20 that of copper at Ku band). The microstrip resonator with a resonant frequency of 12 GHz at 90 K was 60 times better than an analogous copper counterpart and had a low power dependence up to 90 K. Various characteristics of the resonator are presented. The fabrication technique using a high temperature superconducting thin film improves the performance of the filter
Keywords :
Q-factor; barium compounds; electron device manufacture; high-temperature superconductors; microstrip resonators; sputter deposition; superconducting device testing; superconducting microwave devices; superconducting resonators; superconducting thin films; surface conductivity; yttrium compounds; 12 GHz; 90 K; Ku band; SrTiO3; SrTiO3 substrate; YBa2Cu3O7-x thin film; YBa2Cu3O7; fabrication technique; filter; high Q; high temperature superconducting microstrip resonator; low power dependence; low surface resistance; resonant frequency; rf magnetron sputtering; Copper; Fabrication; High temperature superconductors; Magnetic resonance; Microstrip resonators; Sputtering; Substrates; Superconducting microwave devices; Superconducting thin films; Surface resistance;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
0-7803-2651-2
DOI :
10.1109/ICPADM.1997.617655
