One- and two-dimensional plasma wave field and absorption simulations for collisional radiofrequency air plasma sources

Summary form only given. We have carried out simulations of radiofrequency plasma sources capable of producing efficient dense (n=10/sup 13//cm/sup 3/) highly ionized, collisional plasmas with air components. The addition of a moderate magnetic field allows these sources to propagate and absorb the wave at some distance from the antenna coupling structure. We have developed the ANTENNA II code (2-D electromagnetic and electrostatic field solutions with a l-D plasma and magnetic field profile) and and modified the MAXEB computer code (2-D plasma, magnetic field and wave field solutions) which was developed to model and study inductive plasma sources. We have modified the code to include warm plasma thermal effects and the contribution of collisionless (Landau damping) wave absorption by electrons. We present studies of the wave fields and electron heating profiles for highly collisional plasmas as the antenna configuration, wave frequency, plasma collisionality and magnetic field are varied. Our simulations show that the antenna configuration, increased wave frequency and magnetic field can provide desirable plasma heating profiles and propagation away from the antenna structure. The results are directly compared with selected experimental data.