Title :
Electrical properties of ultra thin polymer films
Author :
Maeda, A. ; Zhu, L. ; Kato, T. ; Furuhashi, H. ; Yoshikawa, T. ; Ohashi, A. ; Kojima, K. ; Uchida, Y. ; Ochiai, S. ; Ieda, M. ; Mizutani, T.
Author_Institution :
Dept. of Electr. Eng., Aichi Inst. of Technol., Nagoya, Japan
Abstract :
Ultra thin polyamide (PA) films (thickness: 2~3 nm) were deposited on a glass substrate by the vacuum evaporation method. The evaporated PA thin film was annealed at 200°C for one hour in nitrogen. The FT-IR spectrum of the ultra thin film agreed well with that of a conventional PA film, which suggests that the structure of the two types of film is similar. The binding energies of O1s and C1s spectra shift to the higher energy side. This means that the thin PA film was slightly oxidized in the evaporation process. The breakdown strength and electrical conduction of the thin PA film were discussed. The conduction currents of 2.3 nm-thick film were measured under an applied DC field of 2.5 V, which corresponds to 10 MV/cm. No self healing breakdown occurs until 8 MV/cm. This value is much higher than the breakdown strength of a conventional PA film (2.4 MV/cm). The conduction mechanism of the thin film annealed in vacuum is discussed
Keywords :
Fourier transform spectra; X-ray photoelectron spectra; annealing; electric breakdown; electric strength; electrical conductivity; high field effects; infrared spectra; insulating thin films; organic insulating materials; polymer films; polymer structure; vacuum deposition; 1E-4 Pa; 2 to 3 nm; 2.5 V; 200 C; 285 C; C1s spectra; FT-IR spectrum; O1s spectra; XPS; annealing; applied DC field; binding energies; breakdown strength; conduction currents; conduction mechanism; electrical conduction; film structure; glass substrate; self healing breakdown; ultra thin polyamide films; vacuum evaporation; Annealing; Capacitance measurement; Electric breakdown; Electrodes; Glass; Infrared heating; Polymer films; Substrates; Temperature; Transistors;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
0-7803-2651-2
DOI :
10.1109/ICPADM.1997.617658