Title :
Chemically-milled UHF SC-cut resonators
Author :
Smythe, R.C. ; Angove, R.B.
Author_Institution :
Piezo Technol. Inc., Orlando, FL, USA
Abstract :
Fundamental mode SC-cut resonators with potential for oscillator and filter applications have been developed at 333 MHz, 500 MHz, and 1 GHz using chemical milling to form a ring-supported structure. A novel electrode configuration which eliminates registration problems is used. At 333 MHz, Q values are typically 30×103; the best Q obtained is 34.9×103. At 1 GHz, a Q value of 10.2×103 has been measured. Equivalent circuit parameters, frequency-temperature characteristics nonlinear resonance data, and acceleration sensitivity measurements are reported
Keywords :
Q-factor; crystal resonators; etching; quartz; 333 to 1000 MHz; Q values; Q-factor; SC-cut resonators; SiO2 resonators; UHF; acceleration sensitivity measurements; chemical milling; electrode configuration; eliminates registration problems; frequency-temperature characteristics; fundamental mode; nonlinear resonance data; ring-supported structure; Accelerometers; Chemicals; Electrodes; Equivalent circuits; Milling; Q measurement; Resonance; Resonant frequency; Resonator filters; Ring oscillators;
Conference_Titel :
Frequency Control Symposium, 1988., Proceedings of the 42nd Annual
Conference_Location :
Baltimore, MD
DOI :
10.1109/FREQ.1988.27582
