Title :
X-ray lithography fabrication of Poly-L-Lactides microstructures
Author :
Li, Yigui ; Sugiyama, Susumu
Author_Institution :
Res. Organ. of Sci. & Eng., Ritsmeikan Univ., Kusatsu
Abstract :
The lubrication technique to generate the PLLA microstructures with the very smooth surface is demonstrated. The function of X-ray on PLLA polymer material is breaking the PLLA polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. In this paper, we have illustrated a novel micromachining method for PLLA polymer material. Various polymer structures are fabricated using this novel X-ray lithography technique. The data of exposure doses against the processed depth on the PLLA sheet is shown
Keywords :
X-ray lithography; lubrication; micromachining; polymers; X-ray lithography fabrication; lubrication technique; micromachining method; poly-l-lacticles microstructures; polymer material; Biodegradable materials; Fabrication; Gold; Microstructure; Polymers; Resists; Rough surfaces; Substrates; Surface roughness; X-ray lithography;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320325
