DocumentCode
1654763
Title
X-ray lithography fabrication of Poly-L-Lactides microstructures
Author
Li, Yigui ; Sugiyama, Susumu
Author_Institution
Res. Organ. of Sci. & Eng., Ritsmeikan Univ., Kusatsu
fYear
2006
Firstpage
1
Lastpage
4
Abstract
The lubrication technique to generate the PLLA microstructures with the very smooth surface is demonstrated. The function of X-ray on PLLA polymer material is breaking the PLLA polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. In this paper, we have illustrated a novel micromachining method for PLLA polymer material. Various polymer structures are fabricated using this novel X-ray lithography technique. The data of exposure doses against the processed depth on the PLLA sheet is shown
Keywords
X-ray lithography; lubrication; micromachining; polymers; X-ray lithography fabrication; lubrication technique; micromachining method; poly-l-lacticles microstructures; polymer material; Biodegradable materials; Fabrication; Gold; Microstructure; Polymers; Resists; Rough surfaces; Substrates; Surface roughness; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location
Nagoya
Print_ISBN
1-4244-0717-6
Electronic_ISBN
1-4244-0718-1
Type
conf
DOI
10.1109/MHS.2006.320325
Filename
4110336
Link To Document