• DocumentCode
    1654763
  • Title

    X-ray lithography fabrication of Poly-L-Lactides microstructures

  • Author

    Li, Yigui ; Sugiyama, Susumu

  • Author_Institution
    Res. Organ. of Sci. & Eng., Ritsmeikan Univ., Kusatsu
  • fYear
    2006
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The lubrication technique to generate the PLLA microstructures with the very smooth surface is demonstrated. The function of X-ray on PLLA polymer material is breaking the PLLA polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. In this paper, we have illustrated a novel micromachining method for PLLA polymer material. Various polymer structures are fabricated using this novel X-ray lithography technique. The data of exposure doses against the processed depth on the PLLA sheet is shown
  • Keywords
    X-ray lithography; lubrication; micromachining; polymers; X-ray lithography fabrication; lubrication technique; micromachining method; poly-l-lacticles microstructures; polymer material; Biodegradable materials; Fabrication; Gold; Microstructure; Polymers; Resists; Rough surfaces; Substrates; Surface roughness; X-ray lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science, 2006 International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    1-4244-0717-6
  • Electronic_ISBN
    1-4244-0718-1
  • Type

    conf

  • DOI
    10.1109/MHS.2006.320325
  • Filename
    4110336