In-situ characterization of ferromagnetic shape memory alloy / silicon bimorph nanoactuators

Author

Lay, C. ; Aseguinolaza, I. ; Chernenko, V. ; Kohl, M.

Author_Institution

Inst. of Microstructure Technol., Karlsruhe Inst. of Technol., Karlsruhe, Germany

fYear

2014

fDate

18-21 Aug. 2014

Firstpage

192

Lastpage

195

Abstract

Nano scale actuators consisting of a free-standing bilayer of ferromagnetic shape memory alloy (FSMA) and silicon with critical lateral dimensions of 250 nm are designed, nanofabricated and characterized in-situ in a scanning electron microscope (SEM). Upon Joule heating and cooling, fully reversible nano actuation in out-of-plane direction of up to 4 % of actuator length is observed. In-situ measurements allow the correlation of resistivity and deflection revealing the presence of the shape memory effect superimposing the bimorph thermal expansion.

Keywords

actuators; cooling; ferromagnetic materials; nanofabrication; scanning electron microscopy; shape memory effects; silicon alloys; thermal expansion; FSMA; Joule heating; SEM; bimorph nanoactuators; bimorph thermal expansion; cooling; critical lateral dimensions; deflection correlation; ferromagnetic shape memory alloy; free-standing bilayer; fully reversible nano scale actuation; in-situ characterization measurement; nanofabrication; out-of-plane direction; resistivity correlation; scanning electron microscope; size 250 nm; Conductivity; Heating; Resistance; Shape; Silicon; Temperature measurement; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on

Conference_Location

Toronto, ON

Type

conf

DOI

10.1109/NANO.2014.6967989

Filename

6967989