Title :
Electric field sensors based on hybrid silicon and lithium niobate microring resonators
Author :
Chen, Li ; Reano, Ronald M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Ohio State Univ., Columbus, OH, USA
Abstract :
We present electric field sensors based on the indirect bonding of thin films of lithium niobate to silicon microring resonators using benzocyclobutene as a bonding layer. The demonstrated sensitivity is 4.5 V m-1 Hz-1/2.
Keywords :
electric field measurement; electro-optical devices; lithium compounds; micro-optics; microcavities; micromechanical resonators; organic compounds; ring lasers; benzocyclobutene; bonding layer; electric field sensors; hybrid silicon microring resonators; lithium niobate microring resonators; thin films; Electric fields; Lithium niobate; Optical fiber sensors; Optical films; Optical resonators;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
