Title :
An Electromagnetic Actuator Using a Cylindrical Coil Created wilth 3D X-ray Lithography and Metallization Techniques
Author :
Matsumoto, Yoshifumi ; Yamashita, Shuhei ; Noda, Daiji ; Hattori, Tadashi
Author_Institution :
Lab. of Adv. Sci. & Technol. for Ind., Hyogo Univ.
Abstract :
The demand for microactuators is increasing recently. The key technology to realizing practical microactuators is microfabrication process. In the production of microminiature components, the technologies for processing high-aspect-ratio structures are essential. As one of these technologies, the LIGA (German acronym for lithographite, galvanoformung and abformung) process is widely known. Our laboratory researches the LIGA process to three-dimensional microfabrication and established the cylindrical-micro coil production process. In this paper, we have fabricated the cylindrical-microcoil for to the solenoidal electromagnetic type microactuator. We designed and analyzed microactuators, and fabricated and evaluated microactuator coils produced by the combination of three-dimensional X-ray lithography and level copper plating. We succeeded in creating threaded groove-shaped structures (10 mum line width, 20 mum pitch, and aspect ratio of 5) on the surface of an acrylic pipe by means of three-dimensional X-ray lithography. The processing technology enables the formation of thin-wire coil lines whose current paths feature a large allowable current-carrying capacity, enabling the production of miniature, high-output microactuators
Keywords :
X-ray lithography; electromagnetic actuators; metallisation; microactuators; solenoids; 3D X-ray lithography; 3D microfabrication; LIGA process; cylindrical-microcoil production; electromagnetic actuator; metallization; microminiature components; solenoidal electromagnetic type microactuator; Coils; Copper; Force measurement; Laboratories; Metallization; Microactuators; Piezoelectric actuators; Production; Resists; X-ray lithography;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320225