Title :
Simulation and modeling of the effect of substrate conductivity on coupling inductance
Author :
Massoud, Y. ; White, J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
The goal of this work was to extend the FASTHENRY 3-D inductance extraction program to include the finite conductivity of a semiconductor substrate, and then use the modified program to investigate a variety of on-chip inductive effects. In addition, the limitations of a simple two-loop model for estimating coupling inductance is examined
Keywords :
circuit analysis computing; electrical conductivity; inductance; integrated circuit interconnections; integrated circuit modelling; FASTHENRY 3-D inductance extraction program; coupling inductance; filament discretization; modeling; on-chip inductive effects; parallel interconnect lines; semiconductor substrate; simulation; substrate conductivity; two-loop model limitations; Computational modeling; Conductivity; Conductors; Frequency; Inductance; Integral equations; Magnetic semiconductors; Magnetic separation; Predictive models; Substrates;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.499245
