Title :
Limits- some are more fundamental than others
Author :
Terman, Lewis M.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
The continued progress in miniaturization of semiconductor devices is pushing device dimensions to 0.1 μm and beyond. Potential limits to device miniaturization are considered. It is concluded that for the 16 Gb DRAM technology level, limits are more practical than fundamental, and that even if technology progress were to slow dramatically or stop, system performance improvement could continue through improved design tools, circuit and chip design and system configurations
Keywords :
DRAM chips; VLSI; integrated circuit design; integrated circuit technology; 0.1 micron; 16 Gbit; DRAM technology; design tools; device dimensions; device miniaturization; system configurations; system performance improvement; technology progress; Chip scale packaging; Electricity supply industry; Electronics industry; Industrial control; Integrated circuit interconnections; MOS devices; Moore´s Law; Semiconductor devices; System performance; Threshold voltage;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-3062-5
DOI :
10.1109/ICSICT.1995.499259
