Title :
Fabrication of silicon-core waveguide on bulk Si substrate with mold-assisted method and KrF Excimer laser reformation
Author :
Chen, S. ; Shih-Che Hung ; Shih-Jie Lin ; Hua-Yi Shueh ; Song-Ting Yang ; Sheng-Kai Chang ; Yu-Zhong Lin ; Kuan-Yu Chen ; Ching-Fuh Lin
Author_Institution :
Grad. Inst. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
The work is to fabricate a CMOS-compatible low-loss Si waveguide structures by KrF Excimer laser reformation system. It also solves the on-chip integration issues between electronics and photonics, as well as reduces the propagation loss for on-chip optical interconnect applications. By applying the mold-assisted method, the propagation loss can be reduced to 2±0.2dB/cm.
Keywords :
elemental semiconductors; excimer lasers; krypton compounds; laser materials processing; moulding; optical fabrication; optical interconnections; optical losses; optical waveguides; silicon; CMOS-compatible low-loss Si waveguide structure fabrication; KrF; Si; bulk Si substrate; excimer laser reformation; mold-assisted method; on-chip integration; on-chip optical interconnect; propagation loss; silicon-core waveguide; Loss measurement; Optical waveguides; Photonics; Propagation losses; Silicon; Substrates; Waveguide lasers;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
Conference_Location :
Toronto, ON
DOI :
10.1109/NANO.2014.6968031
