Motion analysis of a micro-actuator using three piezoelectric actuators

Displacement of a micro-actuator is described theoretically and experimentally. The actuator uses three stacked-type piezoelectric actuators which are connected in an equilateral triangle, and three electromagnets which are attached at all the vertexes of the triangle. The actuator, which can realize a precise motion, is developed for a flexible conveying system, such a desktop manufacturing system. The actuator is used in a micro/nano system which requires a nanometer resolution with multi degrees of freedom. The displacement of the actuator is simulated and demonstrated experimentally