Title :
Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry
Author :
Kuznetsov, Ilya ; Filevich, Jorge ; Dong, Feng ; Chao, Weilun ; Anderson, Erik H. ; Bernstein, Elliot R. ; Crick, Dean C. ; Rocca, Jorge J. ; Menoni, Carmen S.
Abstract :
We demonstrate a novel mass spectrometry nanoprobe that uses soft x-ray laser ablation to map chemical composition. Composition maps of metal/dielectric/polymer samples with 250nm surface and 50nm depth resolution were obtained.
Keywords :
X-ray lasers; laser ablation; mass spectroscopy; probes; chemical composition; composition maps; depth 50 nm; mass spectrometry nanoprobe; nanoscale 3D composition imaging; size 250 nm; soft x-ray laser ablation mass spectrometry; Chemical lasers; Indium tin oxide; Laser ablation; Laser theory; Mass spectroscopy; Spatial resolution; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
