Title :
Microdeformation microscopy using a vibrating tip
Author :
Cretin, B. ; Sthal, F.
Author_Institution :
Lab. de Phys. et Metrologie des Oscillateurs, Univ. de Franche-Comte-Besancon, France
Abstract :
A new type of microscope, based on a vibrating contact tip and piezoelectric detection is described. The tip diameter defines the resolution of the instrument as in other near-field microscopes. The obtained images reveal surface topography and subsurface elastic inhomogeneities. The microdeformation principle and the setup are presented. Amplitude and phase images show surface and subsurface defects in metallic samples
Keywords :
acoustic microscopy; flaw detection; surface structure; surface topography measurement; ultrasonic materials testing; acoustic microscopy; metallic samples; microdeformation microscopy; phase images; piezoelectric detection; scanning microscopy; subsurface defects; subsurface elastic inhomogeneities; surface defects; surface topography; vibrating tip; Acoustic signal detection; Acoustic waves; Frequency; Laser excitation; Microscopy; Piezoelectric transducers; Structural beams; Surface acoustic waves; Surface topography; Vibration measurement;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275904
