Title :
Realization of high Tc superconducting microstrip filter for communication
Author :
Dong-Chul Chung ; Huh, Won-II ; Han, Byoung-Sung
Author_Institution :
Dept. of Electr. Eng., Chonbuk Nat. Univ., Chonju, South Korea
Abstract :
A high temperature superconductor microstrip filter at Ku-band was designed and fabricated. YBa2Cu3O7-x epitaxial thin films were grown on MgO substrates by rf-sputtering deposition. The filter patterns on the YBa2Cu3O 7-x/MgO film were generated using conventional photolithography and EDTA etching. Experimental results for the YBa2Cu3O7-x superconducting filter in terms of frequency response, frequency band, and other characteristics, were reported. The filter performance was superior to that of filters fabricated from Cu-metal films
Keywords :
barium compounds; electron device manufacture; etching; frequency response; high-temperature superconductors; magnesium compounds; microstrip filters; photolithography; sputter deposition; superconducting device testing; superconducting epitaxial layers; superconducting microwave devices; vapour phase epitaxial growth; yttrium compounds; 12 GHz; EDTA etching; Ku-band; MgO; MgO substrates; YBa2Cu3O7-x epitaxial thin films; YBa2Cu3O7; filter patterns; frequency response; high temperature superconductor microstrip filter; photolithography; reflection parameter; rf-sputtering deposition; transmission parameter; Etching; Frequency response; High temperature superconductors; Lithography; Microstrip filters; Sputtering; Substrates; Superconducting films; Superconducting filters; Superconducting thin films;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
0-7803-2651-2
DOI :
10.1109/ICPADM.1997.617668
