Title :
Applications of microelectronics and microfabrication to ultrasound imaging systems
Author :
Robinson, A.L. ; Mo, J.-H.
Author_Institution :
Solid State Electron. Lab., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Recent work on techniques for applying microelectronics and related microfabrication technology to different aspects of ultrasound imaging systems is described. Particular topics addressed include integrated transducer arrays, acoustic crosstalk, microelectronics for front-end interface circuits, microelectronic preamplifiers, microelectronic design flexibility, microfabrication techniques for 2-D arrays, and 3-D interconnects for 2-D arrays
Keywords :
acoustic arrays; acoustic imaging; crosstalk; integrated circuit technology; micromechanical devices; ultrasonic transducers; 2-D arrays; 3-D interconnects; acoustic crosstalk; front-end interface circuits; integrated transducer arrays; microelectronic design flexibility; microelectronic preamplifiers; microelectronics; microfabrication; monolithic approach; piezopolymers; substrate micromachining; ultrasound imaging systems; Acoustic arrays; Acoustic imaging; Acoustic transducers; Crosstalk; Flexible printed circuits; Integrated circuit technology; Microelectronics; Preamplifiers; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275914
