Integrated nanotechnology, electronics and microsystems: Sensing paradigms and transformative MEMS technologies

We document transformative research, practical engineering solutions and enabling sensing technologies. Microsystems integrate nanotechnology, microelectronics and micromachining. Micro-electromechanical systems (MEMS) are used in various applications. In aerospace, automotive, energy, manufacturing, medical, naval and other systems, autonomous MEMS measure physical quantities, process the data, transmit information and ensure control. Acceleration, electromagnetic fields, flow rate, position, pressure, temperature, velocity, viscosity and other physical quantities can be measured. MEMS enable biotechnology and medicine. Microsystems measure impurities, analyse bio and chemical compositions of liquids and gasses, perform DNA profiling, analyse genes and proteins, etc. Using recent nanotechnology-enabled solutions, we use application-specific nanostructured sensing materials and fabrics. A consistent device-level integration of nanostructured materials and nanoscaled microelectronic is ensured. Modular MEMS include self-sustainable energy sources, energy storage solution and energy management. We design, fabricate, test and characterize functional autonomous microsystems.