• DocumentCode
    1656549
  • Title

    Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating

  • Author

    Cheung, S.T.S. ; Guan, B. ; Djordjevic, S.S. ; Okamoto, K. ; Yoo, S.J.B.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Davis, CA, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report high-extinction and low-loss 40-channel × 100-GHz arrayed waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching condition resulting in <; 0.8 dB/cm loss and low phase errors.
  • Keywords
    diffraction gratings; integrated optics; laser beam etching; optical losses; silicon-on-insulator; arrayed waveguide grating; high quality etching condition; high-extinction; low phase errors; low-loss high contrast silicon-on-insulator; Arrayed waveguide gratings; Loss measurement; Plasmas; Resists; Silicon; Waveguide discontinuities;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325770
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1656549