Title :
Stamp printing of silicon nanomembrane based flexible photonic devices
Author :
Xu, Xiaochuan ; Subbaraman, Harish ; Hosseini, Amir ; Kwong, David ; Lin, Che-Yun ; Chen, Ray T.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.
Keywords :
elemental semiconductors; integrated optics; light propagation; nanophotonics; optical waveguides; printing; silicon; Si; nanomembrane based flexible photonic devices; propagation loss; stamp printing; transferred waveguide; Etching; Loss measurement; Optical waveguides; Photonics; Printing; Silicon; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
