DocumentCode
165705
Title
Molecular dynamics study of nano-scale Ag surface electromigration and effect of Pd coating layer
Author
Xu, Di E. ; Hook, Michael D. ; Mayer, M.
Author_Institution
Center for Adv. Mater. Joining (CAMJ), Univ. of Waterloo, Waterloo, ON, Canada
fYear
2014
fDate
18-21 Aug. 2014
Firstpage
640
Lastpage
644
Abstract
Ag is the most conductive metal but is vulnerable to electromigration (EM), which can limit its application in e.g. microelectronics. Molecular dynamics (MD) is used to simulate the migrating behavior of an Ag surface by adding an extra directional force on each atom. The migration of Ag atoms is found to be limited to the topmost 4 (002) lattice planes in the first 40 ns while atoms in the crystal bulk remain oscillating around their equilibrium positions. A Pd coating layer is shown to be a protection from EM for an Ag surface. After adding a layer of 9 Pd (002) lattice planes, the same procedure is repeated with different forces. No migration happens until the extra directional force become so large that all atoms of the model end up moving freely. The MD model presented in this paper can lead to an understanding of EM at the atomic scale and a guideline for potential reliability improvement of microelectronics by coating technology.
Keywords
coatings; electromigration; molecular dynamics method; nanofabrication; nanostructured materials; palladium; silver; Ag atom migration; Ag-Pd; EM protection; Pd (002) lattice planes; Pd coating layer effect; bulk crystal; coating technology; conductive metal; equilibrium positions; extra directional force; microelectronics; molecular dynamics study; nanoscale Ag surface electromigration; potential reliability improvement; time 40 ns; topmost 4(002) lattice planes; Atomic layer deposition; Coatings; Electromigration; Force; Metals; Surface treatment; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
Conference_Location
Toronto, ON
Type
conf
DOI
10.1109/NANO.2014.6968101
Filename
6968101
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